衍射光学DOE 完整解决方案

十三年经验,提供高质量微纳衍射光学器件的完整解决方案

精度
纳米级结构制造
理论
物理光学
加工
光刻工艺
波长
UV可见-近红外
技术方案已获得中、美、英、欧等世界顶级实验室的认可
🇨🇳 🇺🇸 🇬🇧 🇪🇺

围绕用户需求的衍射光学系统级解决方案

基于微纳衍射光学理论,我们提供从设计到量产的全流程衍射光学服务。可开发光束整形、分束、长焦深等各类衍射光学器件,依托石英光刻工艺实现高精度批量加工。具备16阶衍射光学器件及超表面器件的加工能力,全面支持科研仪器等精密光学系统的开发、集成与迭代优化。技术方案已获得中、美、欧等地世界顶级实验室的认可。

一站式衍射光学器件解决方案:理论设计→仿真验证→微纳加工→系统集成→迭代优化。

DOE Design
Diffractive Optical Element (DOE)
定制服务

围绕客户系统需求的优化设计

支持与整机光路协同设计,确保系统级适配

依托波前调制的理论设计与光学仿真

设计过程充分考虑工程可实现性

设计仿真

光刻工艺性能指标

历经7年迭代优化的稳定石英光刻工艺

UV-NIR
波长范围
≤0.5 μm
套刻精度
≤5nm
刻蚀精度
10
深宽比

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"Extending Depth-of-Field of Arbitrary Diffractive Optics with Needle-Shaped Beam Modulation." ACS Photonics (2024).
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"Diffractive beam shaper for multiwavelength lasers for flow cytometry." Cytometry Part A 99, no. 2 (2021): 194–204.
"Using binary optical elements (BOEs) to generate rectangular spots for illumination in micro flow cytometer." Biomicrofluidics 10, no. 5 (2016).

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